- Input voltage：380V
- Output power：5KW
- Output voltage(Max)：1KV
- Output current(Max)：6A
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Main Technical Parameters |
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Product Name |
5KWMedium Frequency Magnetron SputteringCoatingPower Supply |
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Product Model |
WZP5 |
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Product Brand |
Yochain |
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Power Supply Type |
Fully Digital Controlled Intelligent Power Supply |
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Input Voltage： |
AC380V±10 % |
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Output |
Power: |
5KW |
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Current: |
0~6A |
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Voltage: |
Working Voltage200~ 800V,No-load Voltage> 1KV |
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Frequency |
40Khz |
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Wave Type |
Quasi-sine Wave |
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mode |
custom Constant Voltage、Constant Current、Constant Power |
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Adjustment Accuracy |
≤1 % |
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Efficiency |
≥90 % |
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Power factor |
cosΦ≥0.9 |
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Control Mode: |
Power Supply Panel button Control |
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AnalogSignal Control：TTL Electric flat ， can Control Stop Working ，Output Voltage or Output Current or Output Power，External Open Circuit Protection( general Used for Water Flow Protection) |
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Digital Interface Control：485Communication。AlsoCustom232Interface |
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IoT Net WIFI Connection，Remote Net network Monitoring |
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Display Mode: |
English LCD Display |
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Display content ： |
WorkingStatus，Output Voltage，Output Current， set value |
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Output Protection |
Output overvoltage ，Output overcurrent ，Output malfunction |
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Input Protection |
Input overvoltage ，Input undervoltage ，Input overcurrent ， phase loss |
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safe Protection |
GroundingProtection， leak Electric Protection， external control Protection, lightning protection Protection，Overheat |
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Insulation Class |
B level |
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Protection Class |
IP20 |
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Protection response time |
1u S |
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Input |
to HousingElectric resist |
≥20MΩ |
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Output |
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Input to HousingWithstand Voltage |
2000V/1min |
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Input to Output Withstand Voltage |
3500V/1min |
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OperatingEnvironment |
Temperature Degree： |
0～35 C |
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Humidity： |
≤80 % |
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CoolingMethod： |
Air Cooled |
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Dimensions： |
480*135*380(mm ) |
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Features : |
Volume Small ，Weight light ， structure Simple，Easy to Operate，Stable and Reliable |
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Circuit adopt Module chemical design ，DebuggingingRepair Convenient。 |
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able platingInsulation film layer ， notgenerate Electric arc ， Load Suitable Range Wide |
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Remarks： |
Factory Default Analog Interface |
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Fault Prompt |
Intelligent Fault Testing Minute analysis , upper limit Fault Alarm， has Parameter Settingerror , human Operation error ,Power Supply internal factor multi-level error code sequence 。 |
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Medium Frequency Magnetron Sputtering Power Supply Application Field Description
Medium Frequency Magnetron Sputtering Power Supply work for physical Gas phase deposit (PVD)Technical of core can amount Device， via Output 40k Hz of Medium Frequency ACor Pulse signal ，Effective solve done DC Sputteringin reaction Mode below of target toxicity and arc Light Discharge problem ，
meanwhilegive consideration to done deposit speed rate and film layer mass 。 its Application already cover cover from traditional industrial Manufacturingto front alongtechnology of multi Piece Field：
1. ** buildingand auto vehicleglass Coating **
- ** Low-E save canglass **： in buildingcurtain wall and auto vehicle vehicle window above deposit multi layer medium film and metal film ， achieve High through Light Nature and Low Radiation rate of combine ， display notable raise Liter heat insulation maintain Temperature Nature can 。
- ** self cleanglass **： prepare two Oxidation titanium (Ti O₂) Light catalysis thin film ， utilize Light solution action Minute solution has Machine thing ， achieve surface self clean Functions。
2. ** flat face Display and touch control Panel**
- ** through clearguide Electric film **：Used for Sputtering Oxidation indium tin ( IT O) target material ， prepare High through Light rate 、 Low Electric resist ofguide Electric layer ， wide response Used for LCD Display Device( LCD)、 has Machine emit Light Bipolar tube (OLED) and Touch Screen。
- ** Light science reduce anti emit film **： in Display Panel surface deposit multi layer medium film ， decrease Environment Light anti emit ， raise Liter screen can view corner Degree and clear Degree。
3. ** semiconductor and Electronic Device Piece**
- ** metal interconnect layer **： deposit copper (Cu)、 aluminum (Al)、 tungsten (W) etc metal thin film ， work for core Sheet internal part guide Line and connect touch Hole fill fill Materials。
- ** expand dissipate resist block layer **： prepare nitrogen chemical titanium (Ti N)、 nitrogen chemical tantalum (Ta N) etc thin film ， prevent metal ion direction semiconductor base body expand dissipate ， accurate maintain Device Piece Stability。
4. ** tools and Machine machine part Piece surface strong chemical **
- ** hardware quality wear resistant coating **： in cut cut cuttingtool 、 mold surface deposit nitrogen chemical titanium (Ti N)、 carbon chemical titanium (Ti C)、 nitrogen chemical aluminum titanium (Ti Al N) etc Ultra hardware thin film ， make tools Lifetime extend Long3-5 times 。
- ** Low friction coating **： prepare typegold just stone (DLC) thin film ， response Used for emit dynamic Machine part Piece、Shaft bear etc ， reduce Low friction system number ， raise Liter Energy Efficiency。
5. ** new can source and Light Electronic**
- ** thin film Solar Battery**： in CIGS( copper indiumgallium selenium )Battery deposit back Electric Pole and absorption layer ，or in silicon different quality result Battery prepare through clearguide Electric layer 。
- ** lithium Battery Functions coating **： in Electric Polegather flow body above deposit nano Meter levelguide Electric coating ， raise Liter Battery cycle Nature can and Safety。
6. ** decoration and consumption Electronic**
- ** imitationgold /Color color decoration film **： in Stainless Steel、 ceramic 、Plastic etc base material above deposit nitrogen chemical zirconium (Zr N)、 carbon nitrogen chemical titanium (Ti CN) etc thin film ， presentgold color 、 black color 、 rosegold etc multi Type color marsh ，Used for hand meter 、 hand Machine Housing 、 bathroom fivegold etc 。
- ** defense fingerprint film **： inglass or metal surface deposit include Fluorination combine thingthin film ， achieve sparse water sparse oil Functions。
7. ** Light science element Piece and military work **
- **High Nature can Light science film **： prepare exc Light anti emit film 、 increase through film 、Filter etc ， response Used for Laser、 look far mirror 、 night view Instrument etc Precision Light science System。
- ** hide body Functions Materials**： research emit Wide Frequency absorb Wave coating ，Used for military equipment of radar Wave absorption structure 。
Medium Frequency Magnetron Sputtering Power Supply by means of its to metal 、 combine gold 、 semiconductor and part Minute Insulation Materials of wide suitable Nature， become for modern Manufacturingindustry achieve High Nature can thin film prepare of close key equipment ， push dynamic arrive new Materials、 new can source 、 new one replace information Technical etc strategy Nature new prosperity industry of Technical progress 。
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