- Input voltage：380V
- Output power：20KW
- Output voltage(Max)：700V
- Output current(Max)：40A
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Main Technical Parameters |
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Product Name |
20KWMedium Frequency Magnetron SputteringCoatingPower Supply |
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Product Model |
WZP20-600V |
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Product Brand |
Yochain |
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Power Supply Type |
Fully Digital Controlled Intelligent Power Supply |
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Input Voltage： |
AC380V±10 % |
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Output |
Power: |
20KW |
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Current: |
0~40A |
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Voltage: |
Rated Voltage500V,Maximum Voltage> 600V |
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Frequency |
40Khz |
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Wave Type |
Quasi-sine Wave |
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mode |
custom Constant Voltage、Constant Current、Constant Power |
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Adjustment Accuracy |
≤1 % |
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Efficiency |
≥90 % |
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Power factor |
cosΦ≥0.9 |
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Control Mode: |
Power Supply Panel button Control |
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AnalogSignal Control：TTL Electric flat ， can Control Stop Working ，Output Voltage or Output Current or Output Power，External Open Circuit Protection( general Used for Water Flow Protection) |
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Digital Interface Control：485Communication。AlsoCustom232Interface |
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IoT Net WIFI Connection，Remote Net network Monitoring |
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Display Mode: |
English LCD Display |
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Display content ： |
WorkingStatus，Output Voltage，Output Current， set value |
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Output Protection |
Output overvoltage ，Output overcurrent ，Output malfunction |
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Input Protection |
Input overvoltage ，Input undervoltage ，Input overcurrent ， phase loss |
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safe Protection |
GroundingProtection， leak Electric Protection， external control Protection, lightning protection Protection，Overheat |
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Insulation Class |
B level |
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Protection Class |
IP20 |
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Protection response time |
1u S |
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Input |
to HousingElectric resist |
≥20MΩ |
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Output |
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Input to HousingWithstand Voltage |
2000V/1min |
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Input to Output Withstand Voltage |
3500V/1min |
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OperatingEnvironment |
Temperature Degree： |
0～35 C |
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Humidity： |
≤80 % |
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CoolingMethod： |
Water Cooled |
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Dimensions： |
480*135*380(mm ) |
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Features : |
Volume Small ，Weight light ， structure Simple，Easy to Operate，Stable and Reliable |
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Circuit adopt Module chemical design ，DebuggingingRepair Convenient。 |
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Vacuum Cleaning Power Supply， not easygenerate Electric arc ， Load Suitable Range Wide |
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Application Range |
Output Voltage side Low，Output Current Large ， if Used for Magnetron Sputtering ，Suitable for Vacuum Gas pressure compare High ，Working Voltage compare Low of application |
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Remarks： |
Factory Default TTL Analog Interface and 485Interface |
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Fault Prompt |
Fully Digital Controlled Intelligent Power Supply, has 10 multi Type Fault Testinghandle System，Fault With Sound sound Prompt and English raise wake ， can Output Fault Type |
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Features is ：Output Voltage side Low，Output Current Large ，Suitable for Working Voltage compare Low of application
Output Power：20KW
Output Frequency：40K Hz
Maximum Voltage：600V
Rated Output Voltage：500V
Output Voltage for 40K Hz of Quasi-sine Wave AC Voltage
Output Current：40A:
Dimensions：480*480*135mm(Width x Height x Depth)
Medium Frequency Magnetron Sputtering Power Supply Application Field Description
Medium Frequency Magnetron Sputtering Power Supply work for physical Gas phase deposit (PVD)Technical of core can amount Device， via Output 40k Hz of Medium Frequency ACor Pulse signal ，Effective solve done DC Sputteringin reaction Mode below of target toxicity and arc Light Discharge problem ，
meanwhilegive consideration to done deposit speed rate and film layer mass 。 its Application already cover cover from traditional industrial Manufacturingto front alongtechnology of multi Piece Field：
1. ** buildingand auto vehicleglass Coating **
- ** Low-E save canglass **： in buildingcurtain wall and auto vehicle vehicle window above deposit multi layer medium film and metal film ， achieve High through Light Nature and Low Radiation rate of combine ， display notable raise Liter heat insulation maintain Temperature Nature can 。
- ** self cleanglass **： prepare two Oxidation titanium (Ti O₂) Light catalysis thin film ， utilize Light solution action Minute solution has Machine thing ， achieve surface self clean Functions。
2. ** flat face Display and touch control Panel**
- ** through clearguide Electric film **：Used for Sputtering Oxidation indium tin ( IT O) target material ， prepare High through Light rate 、 Low Electric resist ofguide Electric layer ， wide response Used for LCD Display Device( LCD)、 has Machine emit Light Bipolar tube (OLED) and Touch Screen。
- ** Light science reduce anti emit film **： in Display Panel surface deposit multi layer medium film ， decrease Environment Light anti emit ， raise Liter screen can view corner Degree and clear Degree。
3. ** semiconductor and Electronic Device Piece**
- ** metal interconnect layer **： deposit copper (Cu)、 aluminum (Al)、 tungsten (W) etc metal thin film ， work for core Sheet internal part guide Line and connect touch Hole fill fill Materials。
- ** expand dissipate resist block layer **： prepare nitrogen chemical titanium (Ti N)、 nitrogen chemical tantalum (Ta N) etc thin film ， prevent metal ion direction semiconductor base body expand dissipate ， accurate maintain Device Piece Stability。
4. ** tools and Machine machine part Piece surface strong chemical **
- ** hardware quality wear resistant coating **： in cut cut cuttingtool 、 mold surface deposit nitrogen chemical titanium (Ti N)、 carbon chemical titanium (Ti C)、 nitrogen chemical aluminum titanium (Ti Al N) etc Ultra hardware thin film ， make tools Lifetime extend Long3-5 times 。
- ** Low friction coating **： prepare typegold just stone (DLC) thin film ， response Used for emit dynamic Machine part Piece、Shaft bear etc ， reduce Low friction system number ， raise Liter Energy Efficiency。
5. ** new can source and Light Electronic**
- ** thin film Solar Battery**： in CIGS( copper indiumgallium selenium )Battery deposit back Electric Pole and absorption layer ，or in silicon different quality result Battery prepare through clearguide Electric layer 。
- ** lithium Battery Functions coating **： in Electric Polegather flow body above deposit nano Meter levelguide Electric coating ， raise Liter Battery cycle Nature can and Safety。
6. ** decoration and consumption Electronic**
- ** imitationgold /Color color decoration film **： in Stainless Steel、 ceramic 、Plastic etc base material above deposit nitrogen chemical zirconium (Zr N)、 carbon nitrogen chemical titanium (Ti CN) etc thin film ， presentgold color 、 black color 、 rosegold etc multi Type color marsh ，Used for hand meter 、 hand Machine Housing 、 bathroom fivegold etc 。
- ** defense fingerprint film **： inglass or metal surface deposit include Fluorination combine thingthin film ， achieve sparse water sparse oil Functions。
7. ** Light science element Piece and military work **
- **High Nature can Light science film **： prepare exc Light anti emit film 、 increase through film 、Filter etc ， response Used for Laser、 look far mirror 、 night view Instrument etc Precision Light science System。
- ** hide body Functions Materials**： research emit Wide Frequency absorb Wave coating ，Used for military equipment of radar Wave absorption structure 。
Medium Frequency Magnetron Sputtering Power Supply by means of its to metal 、 combine gold 、 semiconductor and part Minute Insulation Materials of wide suitable Nature， become for modern Manufacturingindustry achieve High Nature can thin film prepare of close key equipment ， push dynamic arrive new Materials、 new can source 、 new one replace information Technical etc strategy Nature new prosperity industry of Technical progress 。
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